Dabere na ngwa nke Bandlọ ihe nkiri, enwere ụdị 3 iko nke abụọ n'ụlọ.
| Greedi | Iko Quartz | A na-etinye akwụkwọ nke ikuku (μm) |
| Jgs1 | Igwe OV dị anya quartz | 0.185-2.5 |
| Jgs2 | Iko uv | 0.220-2.5 |
| Jgs3 | A na-eji anya ngwa ngwa quartz | 0.260-3.5 |
| Paramita | Uru | Jgs1 | Jgs2 | Jgs3 |
| Nha kachasị | <Φ200mm | <Φ300mm | <Φ200mm |
| Ngalaba nnyefe (Nnyefe na-agagharị) | 0.17 ~ 2.10UM (Tavg> 90%) | 0.26 ~ 2.10UM (Tavg> 85%) | 0.185 ~ 3.50UM (Tavg> 85%) |
| Fluorescence (ex 254nm) | Ọ fọrọ nke nta ka ọ bụrụ n'efu | Ike vb | Ike vb |
| Usoro nzere | CVD CVD | Oxy-hydrogen agbaze | Elektro agbaze |
| Ngwa | Ibu Laser: Window, lens, Prism, enyo ... | Semiconductor na elu windo okpomọkụ | IR & UV uzo |
Iko nke SPASA bụ iko zuru ụwa ọnụ na-eweta nnabata dị mma, ọnụahịa asọmpi na oge nnyefe. Anyị na-enye ha aha ọma na mpaghara dịgasị iche iche na ichekwa ụdị dị iche iche nke Quartz / borosilication / borosinin na-achọ.
Oge post: Apr-24-2020
